1200℃ single heating zone low vacuum CVD system with 3-channel float flowmeter to supply gas O1200-50IT-3F-LV
1200℃ single heating zone low vacuum CVD system is equipped with a three-channel float flowmeter, which can mix 1~3 channels of gas to accurately prepare the mixed gas required for the experiment. Another pressure gauge is installed on the front of the float flowmeter to monitor the gas pressure and the mixing tank pressure.
Product Description
The 1200℃ single heating zone low vacuum chemical vapor deposition (CVD) system, identified as Model O1200-50IT, is a versatile solution catering to diverse applications in high-temperature environments. This sophisticated system is comprised of a single heating zone tube furnace, a three-channel float flow meter, and a double-stage rotary vane vacuum pump. The tube furnace, under precise PID temperature control, allows users to customize a 30-segment raising and falling temperature program while incorporating safeguards against overheating and short circuits.
Operational ease is a key feature, facilitated by a high-definition true color touch screen, making the system accessible even to non-professionals after minimal training. Digital vacuum and mechanical pressure gauges on both sides of the furnace tube enable meticulous control of the atmospheric conditions within. Tailored for applications such as high-temperature sintering, metal annealing, and quality inspection, especially in academic, research, and industrial settings, the system is optimized for CVD experiments requiring a variety of gas mixing atmospheres.
Delving into the technical parameters, the vacuum tube furnace boasts the model O1200-50IT, constructed from high-purity quartz material. Tube diameter options include 50mm, with additional choices of 60mm, 80mm, or 100mm, and a tube length of 800mm. The furnace chamber extends 440mm in length, accommodating a heating zone spanning 400mm, including a constant temperature zone of 200mm. Operating within a temperature range of 0 to 1100℃, the system ensures precise temperature control with an accuracy of ±1℃. Users have the flexibility to choose between a 30 or 50 segment program temperature control mode, with pertinent information displayed on an LCD interface.
Sealing integrity is maintained through a 304 stainless steel vacuum flange, complemented by flange interfaces equipped with 1/4" cutting sleeve joints and KF16/25/40 joints. The vacuum level is sustained at 4.4E-3Pa, drawing power from a stable AC supply of 220V at 50/60Hz. The gas supply system, denoted as Model 3F, features a 3-channel gas channel with gas float flow meters. Measuring range options encompass A channel (0-100ml/min H2 gas), B channel (16-160ml/min N2 gas), and C channel (25-250ml/min Ar gas), all boasting a measurement accuracy of ±2.0%. Gas channel components, including connecting pipes and control valves, are constructed from robust 304 stainless steel, with interface specifications featuring 1/4" ferrule connectors for gas inlet and outlet.
The exhaust system combines a mechanical pump and a rotary vane pump, featuring a commendable pumping rate of 1.1L/S and a KF16 interface. Vacuum measurement integrates a resistance gauge, achieving an ultimate vacuum level of 1.0E-1Pa. The power supply for the exhaust system aligns with the main system, operating at AC:220V 50/60Hz. This comprehensive system is poised to enhance experimental efficiency in a range of high-temperature applications.
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