1200℃ three heating zone high vacuum CVD system with 3-channel mass flow meter O1200-50IIIT-3Z-HV
1200℃ three heating zone high vacuum CVD system is equipped with three-channel mass flowmeter, which has high precision and high reliability. It can accurately mix 1~3 channels of gas. The operation panel adopts digital display, which is intuitive and efficient. If you have special needs, you can contact the technician to customize any number of gas channels.
Product Description
The Model O1200-50IIIT, a 1200℃ three-heating-zone high vacuum chemical vapor deposition (CVD) system, is meticulously designed to provide advanced capabilities for a range of high-temperature applications. The system comprises a three-heating zone tube furnace, a three-channel mass flow meter, and a high vacuum molecular pump set. The tube furnace is a sophisticated component with independently temperature-controlled heating zones, allowing users to create three temperature gradients or establish a long constant temperature zone. The system's intuitive operation through a high-definition true-color touch screen enhances accessibility, making it user-friendly even for non-professionals after minimal training.
To ensure a precise and controlled experimental environment, the system incorporates a precision molecular pump set capable of achieving an impressive vacuum degree of 1.0E-3Pa, surpassing the capabilities of ordinary mechanical pumps. This feature enhances the purity and stringency of experimental conditions.
Designated as Model O1200-50IIIT, the vacuum tube furnace is crafted from high-purity quartz material, offering flexibility with tube diameters of 50mm (optional sizes of 60mm, 80mm, and 100mm) and a tube length of 1300mm. The furnace chamber spans 1060mm and features three heating zones, each measuring 300mm. Precise temperature control ranging from 0 to 1100℃ with an accuracy of ±1℃ is facilitated through a 30 or 50 segment program temperature control mode, displayed on a convenient LCD interface.
Sealing is achieved through a 304 stainless steel vacuum flange, offering 1/4" ferrule connectors and KF16/25/40 joints. Operating under a vacuum pressure of 4.4E-3Pa, the system is powered by an AC supply of 220V at 50/60Hz. The gas supply system, Model 3Z, features a 3-channel gas channel with gas mass flow meters catering to specific gases (H2, N2, Ar). The gas channel components are constructed using 304 stainless steel, maintaining a pipe pressure resistance of 3MPa.
The exhaust system integrates a molecular pump (600) and a rotary vane pump, providing pumping rates of 600L/S and 1.1L/S, respectively. The molecular pump achieves comprehensive gas pumping performance, reaching a vacuum level of 1.0E-3Pa within 30 minutes. Exhaust interfaces are designed with KF40 for pumping and KF16 for exhaust. Vacuum measurement is performed using a compound vacuum gauge, resulting in an ultimate vacuum level of 1.0E-5Pa. The exhaust system operates on AC:220V 50/60Hz, aligning seamlessly with the primary system.
Disclaimer: The information presented on this website, including product images, product descriptions, and technical parameters, serves as a reference guide. Please note that due to potential delays in updates, discrepancies may exist between the content displayed here and the current product status. We encourage you to reach out to our dedicated sales team to verify the most up-to-date details. It is important to understand that the information provided on this site does not constitute a formal offer or commitment, and our company reserves the right to periodically enhance and amend website information without prior notice. We appreciate your understanding in this regard.