1500℃ single heating zone high vacuum CVD system with 3-channel mass flow meter O1500-60IT-3Z-HV
1500℃ single heating zone high vacuum CVD system is equipped with three-channel mass flowmeter, which has high precision and high reliability. It can accurately mix 1~3 channels of gas. The operation panel adopts digital display, which is intuitive and efficient. If you have special needs, you can contact the technician to customize any number of gas channels.
Product Description
The 1500℃ single heating zone high vacuum CVD system is a meticulously engineered apparatus designed for high-performance applications. This sophisticated system comprises a 1500℃ single temperature zone tube furnace, a three-channel float flowmeter, and a high vacuum molecular pump set. The tube furnace, model O1500-60IT, features a high-purity alumina tube with various diameter options (60mm, with alternatives of 50mm, 80mm, and 100mm). The furnace chamber is 400mm long, with a tube length of 1000mm. The heating zone extends to 300mm, complemented by a constant temperature zone of 150mm. Operating efficiently up to temperatures of 1450℃, the system maintains a remarkable temperature control accuracy of ±1℃ through a 30 or 50 segment program temperature control mode displayed on an LCD screen.
The tube furnace employs a precision temperature control instrument for PID temperature control, offering the capability to edit a 30-segment temperature rise and fall program, along with overheating and short circuit protection functions. Digital vacuum gauges and mechanical pressure gauges on both sides of the furnace tube enable precise control of the atmosphere within. The user-friendly operation is facilitated by a high-definition true-color touch screen, making the system accessible even to non-professionals after simple training, significantly enhancing experiment efficiency.
Constructed with a high-purity alumina furnace tube and an integrated design for stability and safety at 1500℃, the heating element consists of a high-quality silicon carbon rod, reaching temperatures of 1500℃. For higher temperature requirements, a customized silicon molybdenum rod heating element can achieve temperatures up to 1700℃. The system is further equipped with a precision molecular pump set, achieving a vacuum level of 1.0E-3Pa, providing users with a purer and more stringent experimental environment compared to ordinary mechanical pumps.
The versatile applications of the 1500℃ single heating zone high vacuum CVD system encompass high-temperature sintering, metal annealing, quality inspection, and CVD experiments requiring various gas mixing atmospheres. The gas supply system, Model 3Z, features three gas channels with gas mass flow meters covering H2, N2, and Ar gases, ensuring precise flow measurements. The exhaust system, comprising a GZK103-A molecular pump and a rotary vane pump, achieves an ultimate vacuum as low as 1.0E-5Pa. With power supplied at AC 220V, 50/60Hz, this comprehensive technical configuration ensures the efficient and precise operation of this high vacuum CVD system.
Disclaimer: The information presented on this website, including product images, product descriptions, and technical parameters, serves as a reference guide. Please note that due to potential delays in updates, discrepancies may exist between the content displayed here and the current product status. We encourage you to reach out to our dedicated sales team to verify the most up-to-date details. It is important to understand that the information provided on this site does not constitute a formal offer or commitment, and our company reserves the right to periodically enhance and amend website information without prior notice. We appreciate your understanding in this regard.