1500℃ single heating zone low vacuum CVD system with 3-channel float flowmeter to supply gas O1500-60IT-3F-LV
1500℃ single heating zone low vacuum CVD system is equipped with a three-channel float flowmeter, which can mix 1~3 channels of gas to accurately prepare the mixed gas required for the experiment. Another pressure gauge is installed on the front of the float flowmeter to monitor the gas pressure and the mixing tank pressure.
Product Description
The 1500℃ single heating zone low vacuum CVD system, designated as the model O1500-60IT, stands as a sophisticated apparatus designed with meticulous technical parameters to ensure optimal functionality. Comprising a 1500℃ single temperature zone tube furnace, a three-channel float flowmeter, and a double stage rotary vane vacuum pump, this system is tailored for high-performance applications. The tube furnace is meticulously controlled by a precision temperature control instrument, allowing users to edit a 30-segment lifting temperature program while incorporating protective features against overheating and short circuits. The intuitive operation through a high-definition true-color touch screen ensures accessibility, even for non-professionals, following straightforward training, thereby significantly enhancing experimental efficiency.
Crafted with a high-purity alumina furnace tube and an integrated design, this system guarantees stability and safety under the demanding conditions of 1500℃. The high-quality silicon carbon rod heating element achieves a maximum temperature of 1500℃, with the flexibility for customers to opt for a customized silicon molybdenum rod heating element, enabling higher temperatures of up to 1700℃. The system is further equipped with a precision molecular pump set, elevating experimental conditions to a vacuum level of 1.0E-3Pa, surpassing the capabilities of conventional mechanical pumps.
Applications for the 1500℃ single heating zone low vacuum CVD system are diverse, encompassing high-temperature sintering, metal annealing, quality inspection, and CVD experiments that necessitate a variety of gas mixing atmospheres. This versatile system finds its place in universities, research institutes, and industrial and mining enterprises. Identified by the model O1500-60IT, the system's technical specifications include a vacuum tube furnace constructed from high-purity alumina, offering a tube diameter of 60mm for durability and heat resistance. The tube extends to a length of 1000mm, accommodating different sample sizes. The furnace chamber, measuring 400mm in length, features a heating zone spanning 300mm and a constant temperature zone of 150mm. Operating efficiently at temperatures up to 1450℃, the system ensures precise temperature control within ±1℃, with flexibility provided by a 30 or 50 segment program, all displayed on an LCD screen for user convenience.
The vacuum system employs a 304 stainless steel vacuum flange with 1/4" ferrule connectors and KF16/25/40 joints, achieving a vacuum capability of 4.4×10E-3Pa. Powered by AC 220V at 50/60Hz, the gas supply system, referred to as Model 3F, features a 3-channel configuration with gas float flow meters ensuring accurate gas flow measurement. The gas channel and needle valves are constructed from 304 stainless steel, providing durability and resistance to corrosive elements. The exhaust system integrates a mechanical pump and rotary vane pump, with a pumping rate of 1.1L/S, enhancing the efficiency of gas evacuation. The exhaust interface is standardized with KF16 connections. To measure the vacuum, the system employs a resistance gauge, enabling accurate pressure reading. The ultimate vacuum attainable with this system is 1.0E-1Pa, making it suitable for various applications, operating on a power supply of AC 220V at 50/60Hz.
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