1700℃ hydrogen reduction CVD system with 2-channel float flowmeter to supply gas T1700-100IC-2F-HP
1700℃ hydrogen reduction CVD system can be used for vacuuming and filling atmosphere, so it is also called vacuum tube furnace and atmosphere tube furnace. The tube is made of a seamless high purity alumina and the maximum working temperature is up to 1650℃. In order to match the test requirements for the introduction of hydrogen, the tube furnace is equipped with a manual ignition device at the right end of the furnace tube to ensure the safety of the test; a vacuum gauge and an air pressure gauge are arranged on the left side of the furnace tube to control the vacuum and atmosphere inside the furnace tube.
Product Description
Ensuring the safety of the testing process, the 1700℃ hydrogen reduction CVD system incorporates an interlocking mechanism that connects the solenoid valve, pressure sensor, and flammable gas detection device. This safety system is further enhanced by the inclusion of a two-channel float flow meter with a stainless steel needle valve and an air pressure gauge. These components work in tandem to accurately mix gases that align with the specific requirements of the test. In standard conditions, this instrument set operates alongside a double-stage rotary vane vacuum pump to establish a general low vacuum test environment. For applications requiring a higher vacuum level, our technicians can be contacted to select a more powerful molecular pump.
Designed for extensive use in materials and chemical laboratories, the 1700℃ hydrogen reduction CVD system features a vacuum tube furnace with a maximum power output of 2.5kW. The furnace incorporates a high purity alumina tube with a diameter of 100mm and a length of 1000mm. Within the furnace chamber, a heating zone spans 400mm, while a constant temperature zone covers 200mm. Operating within an impressive temperature range of 0 to 1650℃, the system maintains a remarkable temperature control accuracy of ±1℃. The furnace's temperature control is facilitated through a 30 or 50 segment program temperature control mode, with settings displayed on an LCD screen.
The vacuum system is equipped with a 304 stainless steel vacuum flange and various flange interfaces, including 1/4" ferrule connectors and KF16/25/40 joints, capable of achieving a vacuum as high as 4.4E-3Pa. The power supply for the entire system is rated at AC 220V, 50/60Hz. The gas supply system, Model 2F, includes two gas channels, each measured with gas float flowmeters. Channel A measures H2 gas with a range of 0 to 100ml, while Channel B measures N2 gas with a range of 16 to 160ml. The system withstands a pipe pressure resistance of 3MPa, with a working pressure difference between 50 and 300KPa, utilizing 304 stainless steel pipes and 1/4" ferrule connectors. The exhaust system features a mechanical pump with a pumping rate of 1.1L/s, utilizing a KF16 fitting as the exhaust interface. Vacuum measurement is conducted with a resistance gauge, offering an ultimate vacuum capability of 1.0E-1Pa. The power supply for the exhaust system remains consistent at AC 220V, 50/60Hz, with the pumping interface also employing a KF16 fitting. This detailed technical setup ensures the reliable and precise operation of the hydrogen reduction CVD system at temperatures up to 1700℃.
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