Anti-Corrosion Three Channel Gas Mixing Control(MFC) Station for CVD System 3Z
The 3Z Anti-Corrosion Three Channel Gas Mixing Control Station designed for CVD systems offers several key features for efficient gas management. It includes multiple gas ways, providing flexibility in selecting the appropriate gas for your specific needs. The core of the system is constructed using 304 stainless steel, which ensures excellent corrosion resistance and durability, making it suitable for a wide range of applications. Additionally, the station is equipped with stainless steel double card quick connectors, making the setup process quick and straightforward while ensuring a secure connection without any risk of gas leakage. These features collectively enhance the reliability and performance of the 3Z gas mixing control station, particularly in environments where corrosion resistance and precision are crucial.
Product Description
The versatile Anti-Corrosion Three Channel Gas Mixing Control Station, known as the 3Z, finds its niche across diverse industries, making it an invaluable asset in semiconductor manufacturing, vacuum coating, special material surface treatment, and gas combustion control. In semiconductor manufacturing, it ensures precise gas control for the production of electronic components, while in vacuum coating equipment, it facilitates controlled gas mixing for surface treatments. The station contributes to corrosion-resistant coatings in special material surface treatment applications and enhances safety and efficiency in gas combustion processes. Additionally, it proves instrumental in leakage detection systems, environmental detection and analysis equipment, and various industries such as chemical, petrochemical, metallurgical, and optical fiber, where precision gas mixing is integral to processes and applications.
The 3Z station is equipped with mass flow meters featuring a 304 stainless steel pipe core and electromagnetic regulating valves. Its three gas pathways, each with a connector size of 1/4", deliver precise measurement accuracy of ±1.0%F.S and outstanding linearity at ±0.5%F.S. Repeat accuracy stands at ±0.2%F.S, ensuring reliability in demanding applications. The station allows flexible gas flow rates, with A way ranging from 0 to 100SCCM, B way from 0 to 200SCCM, and C way from 0 to 500SCCM. With a flow control range of 2% to 100%, it maintains stability with minimal zero temperature drift at 0.6F.S within the temperature range of 15-35℃, showcasing a rapid response time of 2 seconds. Operating under working conditions between 15-50℃, the station is powered by AC 220V at 50-60Hz, making it an indispensable tool for precise gas control in a myriad of industrial settings.
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