Desktop single sputter head magnetron sputtering coater (for depositing aluminum)

This magnetron sputtering coater equipment is a desktop single sputter head magnetron sputtering coating machine. The miniaturized design of the equipment limits the appearance of the equipment to the desktop level, greatly reducing the installation site requirements. The equipment is equipped with a high-performance DC power supply with target refining function, which can effectively remove the oxide layer on the surface of the aluminum target. this magnetron sputtering coater is very suitable for aluminum plating and other materials that are very sensitive to air. This equipment has compact structure and perfect function and is easy to use, and is very suitable for various coating tests. The magnetron sputtering coater, featuring a robust set of technical parameters, excels in precision and efficiency. The sample stage boasts a substantial φ100mm size with an adjustable rotating speed, accommodating speeds ranging from 0 to 20rpm. It offers impressive heating capabilities, achieving temperatures up to a maximum of 500℃ while maintaining precision temperature control. The magnetron sputtering head accommodates one 2-inch target for versatile material deposition. Within the φ180mm x 215mm vacuum chamber, high-purity quartz material ensures a pristine sputtering environment. Observation is facilitated through an omnidirectional transparent observation window, while the upper cover is conveniently removable for easy access. The vacuum system is equipped with a mechanical pump featuring a KF16 pumping port and a molecular pump with a KF40 pumping port. Vacuum measurement employs both a resistance gauge and an ionization gauge, achieving an ultimate vacuum of 1.0E-4Pa. Power supply requirements dictate AC 220V at 50/60Hz, with a pumping rate of 1.1L/s for the mechanical pump and an impressive 600L/s for the molecular pump. The power configuration includes a single DC power supply with a maximum output power of 500W. In terms of size, the coater has overall dimensions measuring 550mm x 350mm x 500mm, with a total power consumption of 2kW. These comprehensive technical specifications collectively define the capabilities and dimensions of the magnetron sputtering coater, providing a clear insight into its features and performance.