Dual-target DC magnetron sputtering coater MSP300S-2DC
Magnetron sputtering coater equipment is a special laboratory coating machine developed by our company. The Magnetron sputtering coater equipment can be used to prepare single or multilayer ferroelectric thin films, conductive films, alloy films, semiconductor films, ceramic films, dielectric films, optical films, etc.
Product Description
The Magnetron sputtering coater equipment offers a versatile solution for thin-film deposition, equipped with both DC and RF power supplies ranging from 500W to 1000W. This flexibility enables the preparation of diverse films, including single or multilayer ferroelectric, conductive, alloy, semiconductor, ceramic, dielectric, and optical films. Its magnetron sputtering process, distinguished by high energy, speed, deposition rate, and minimal sample temperature rise, outperforms conventional plasma sputtering methods. The water-cooled interlayer of the magnetron target effectively dissipates heat, ensuring stable, prolonged operation.
The dual-target DC magnetron sputtering coater, operating on an AC220V, 50Hz power supply with 6KW total power, achieves an ultimate vacuum level of 5x10-4Pa, guaranteeing high-quality coatings. Its φ150mm sample table, capable of reaching a maximum heating temperature of 500℃ with ±1℃ temperature control, accommodates diverse coating needs. Adjustable rotation speeds from 1 to 20rpm enhance its versatility. The coater incorporates two 2-inch magnetron sputtering heads, efficiently cooled by a water-cooling system with a 10L/min flow rate, ensuring consistent and reliable sputtering performance. The vacuum chamber, constructed from durable SUS material, includes a φ100mm watch window for observation and adopts an open design for simplified target replacement.
The gas flow controller, supporting precise control of a 200sccm argon (Ar) gas environment, contributes to effective coating processes. The molecular pump system, with a pumping speed of 600L/S, maintains optimal vacuum conditions. A quartz vibrating film thickness gauge, offering 0.10 angstrom resolution, enables accurate film thickness monitoring. The coater, equipped with two 500W DC power supplies for metal film preparation, operates seamlessly through an intuitive all-in-one computer interface. With dimensions of 1090mm x 900mm x 1250mm and a weight of 350kg, this coater is designed for stability and adaptability in various laboratory or industrial settings, making it a reliable tool for advanced coating applications.
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