Dual-target RF magnetron sputtering coater with two film thickness gauges MSP300S-2RF-2FG
Dual-target RF magnetron sputtering coater is a cost-effective magnetron sputtering coating equipment independently developed by our company. It is standardized, modular and customizable. There are 1-inch or 2-inch magnetron targets for you to choose. Customers can choose the target head according to the size of the substrate to be coated.
Product Description
The Dual-target RF Magnetron Sputtering Coater stands out as a versatile and efficient solution for advanced coating applications. Featuring two 300W RF power sources, specifically designed for the preparation of non-metal films, this coater meets diverse coating needs, including multi-layer coatings. Customization options extend to RF power supply and pulse power supply, ranging from 300W to 1000W, catering to various specifications. The inclusion of a two-channel high-precision mass flow meter ensures precise gas control, with the flexibility to customize up to a four-channel mass flow meter to accommodate complex gas environment requirements.
Equipped with an advanced turbo molecular pump group, the coater achieves an impressive ultimate vacuum level of 1.0E-5Pa, providing an ideal environment for coating processes. The system is complemented by two high-precision film thickness gauges, offering reliable detection during the coating process, with the option for customization to accommodate multiple gauges. An integrated industrial computer enhances operational control, enabling functions such as vacuum pump and sputtering power control, optimizing experimental efficiency.
Application-wise, this coater is designed for the preparation of a diverse range of films, including ferroelectric, conductive, alloy, semiconductor, ceramic, dielectric, optical, oxide, hard, and PTFE films. Its advantages not only lie in its widespread usability but also in its compact size and user-friendly operation, positioning it as an ideal laboratory equipment for material film preparation.
The coater's technical specifications ensure optimal performance. The sample stage, with a generous size of φ185mm, achieves a maximum heating temperature of 500℃ with precise temperature control. It offers an adjustable rotational speed from 1 to 20rpm for versatility in coating applications. The two 2-inch magnetron sputtering heads, featuring a water cooling system, ensure efficient temperature control during operations. A circulating water chiller maintains a steady flow rate of 10L/min for effective heat dissipation.
The φ300mm×300mm stainless steel vacuum chamber incorporates a φ100mm watch window, adopting a top cover open design for easy access and target replacement. The coater's mass flowmeter with two channels provides a measuring range of 100SCCM, customizable according to customer needs, ensuring precise gas flow control. The vacuum system, consisting of a GZK103-A model, 600 molecular pump, and rotary vane pump, achieves an ultimate vacuum level of 1.0E-5Pa.
Operating on AC220V, 50/60Hz, the power configuration includes two RF power supplies with a maximum output power of RF 300W. The coater's compact dimensions (600mm×650mm×1280mm) and weight of approximately 300kg ensure stability and seamless integration into various laboratory or industrial settings. These detailed technical specifications collectively position the Dual-target RF Magnetron Sputtering Coater as a reliable tool for diverse and advanced coating applications.
Disclaimer: The information presented on this website, including product images, product descriptions, and technical parameters, serves as a reference guide. Please note that due to potential delays in updates, discrepancies may exist between the content displayed here and the current product status. We encourage you to reach out to our dedicated sales team to verify the most up-to-date details. It is important to understand that the information provided on this site does not constitute a formal offer or commitment, and our company reserves the right to periodically enhance and amend website information without prior notice. We appreciate your understanding in this regard.