Lab compact vacuum spin coater with vacuum chucks
The Laboratory Compact Vacuum Spin Coater is well-suited for precision surface coating applications, including those in semiconductor manufacturing, silicon wafer processing, substrate coating, conductive glass production, and plate manufacturing. It finds versatile utility across various sectors, including industrial and mining enterprises, scientific research institutions, and educational establishments.
Our CE certified VTC-100A Compact Spin Coater features vacuum chucks for effortless and rapid sol-gel coating on wafers up to 4 inches in diameter. With variable spinning speeds ranging from 500 to 8000 rpm and two programmable segments, it offers precise control over the coating process. The package is thoughtfully inclusive of all necessary accessories, ensuring immediate usability for your coating needs.
Product Description
The Lab Compact Vacuum Spin Coater offers versatile coating capabilities, with a film thickness range spanning from 100 nanometers to 100 micrometers. It accommodates a wide range of materials, including photoresist (PR), polyimide, metal organic compounds, dopants, silicon films, and various organic and aqueous solutions. With its user-friendly interface and compact design, users can effortlessly create, control, store, and manage coating application programs, while automated speed control calculations based on time and speed settings simplify the process. Experimental operations are made efficient through direct front panel control, enhancing user convenience and flexibility.
The Lab Compact Vacuum Spin Coater boasts a comprehensive set of specifications for precise and controlled spin coating applications. Its digital control panel enables users to program two distinct segments, allowing for meticulous control over spin times and speeds. The coater offers a versatile spinning speed range from 500 to 8000 RPM and provides the flexibility to set spinning times between 1 to 60 seconds. It can be powered by either 110VAC or 220VAC, with voltage selection available in the options bar, and includes a 10A fuse for 110VAC operation. Equipped with a powerful 24V DC motor with a maximum rating of 150W, this coater maintains a compact form factor, measuring 13''(L) x 10''(W) x 8.5''(H) and weighing 15 kg (33 lbs). Complying with CE certification, it ensures adherence to rigorous safety and quality standards. When shipped, the dimensions are 40"(L) x 28"(W) x 24"(H), with a total shipping weight of 46 kg (100 lbs), making it a comprehensive and reliable spin coating solution.
Important Warnings: To ensure the proper functioning and longevity of your equipment, please heed the following precautions. Firstly, avoid overflushing the water bowl/base with any liquids, as an excessive amount can infiltrate the motor shaft, potentially causing damage. Instead, employ a fabric cloth to gently remove any residue that accumulates in the bowl/base. Additionally, when flushing the water bowl/base, consider activating the water outlet if necessary to prevent liquid overflow during operation. These safety measures are essential to maintain a clean and safe working environment. For more comprehensive cleaning instructions tailored to your specific spin coater model, kindly consult the provided cleaning guidelines.
The design of this spin coater is rooted in key principles to ensure optimal performance. It features an aluminum casting case that provides stability during spinning processes. The liquid disk is crafted from Polypropylene (PP), a material known for its resistance to corrosive solutions. On the back panel, you'll find a drainage outlet and a connector for a vacuum pump, with a standard filter included to prevent waste water from entering the pump. Notably, this spin coater can be seamlessly integrated into a glovebox environment with either Argon (Ar) or Nitrogen (N2) gas, although the pump must be placed outside the glovebox using a feed-through. For precise control over the coating material, a 20mL syringe is employed, with the syringe holder offering height adjustment and free rotation along the support rod, ensuring flexibility in your coating applications.
The Lab Vacuum Spin Coater offers precise speed and temperature control with low speed variation (0.2rpm) and high temperature uniformity (0.3%). It maintains stable motor spin coating speeds (±1%) and provides versatility with automatic dispensing, cleaning, development, and edge removal options. This coater is both cost-effective and practical, delivering excellent value.
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