Small high vacuum two-in-one film coater
The plasma sputtering and evaporating two-in-one film coater is equipped with DC sputtering target and thermal evaporation assembly, which can be used not only for plasma sputtering, but also obtain carbon or other metal simple films by evaporation.
Product Description
The small high vacuum two-in-one film coater is an advanced instrument designed for precise and versatile film deposition applications. Equipped with both DC sputtering target and a thermal evaporation assembly, it not only facilitates plasma sputtering but also allows the deposition of carbon or other metal films through evaporation processes. The coater adopts a stainless steel vacuum chamber with a high vacuum design, incorporating a precision molecular pump to achieve a high vacuum degree. This feature significantly enhances the purity and uniformity of coatings, ultimately contributing to improved experimental results.
The sample stage of this instrument offers rotation and heating functions, enhancing film adhesion and uniformity. The φ138mm-sized sample stage provides precise temperature control with ±1℃ accuracy and can reach a maximum heating temperature of 500℃. The rotatable sample stage operates at speeds ranging from 1 to 20rpm, ensuring flexibility in the film deposition process. The evaporation system employs a tungsten wire basket as the evaporation source, capable of reaching temperatures up to 1700℃, monitored by an S-type thermocouple.
Constructed from stainless steel, the vacuum chamber features dimensions of φ170mm × 200mm, providing easy access through a top cover opening. The chamber also includes a quartz observation window with a φ70 size for real-time process monitoring. The vacuum system, comprising a GZK103-A model with a KF40 pumping interface, a 600 molecular pump, and a KF16 exhaust interface with a rotary vane pump, ensures efficient evacuation. Vacuum measurements are facilitated by a compound vacuum gauge, and the system achieves an ultimate vacuum level of 1.0E-5Pa.
Operating on an AC220V, 50Hz power supply, the coater has an overall footprint of 600mm×300mm×470mm, making it compact and suitable for placement on a test bench. The total power consumption is 1.5kW, and with a weight of 40kg, it provides a space-saving and efficient solution for film deposition needs in universities and research institutions. Applications of this coater include various operations such as scanning electron microscope sample surface gold spraying, steaming gold, carbon spraying, and the preparation of non-conductive material test electrodes.
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